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| 名稱:三氟化氮 型號(hào): | | | | |
三氟化氮NF3
商品詳細(xì)介紹 |
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A colorless,toxic,nonflammable,oxidizing,high pressure gas. (一種無色、有毒、不燃、具有氧化性的高壓氣體) |
Formula(分子式): |
NF3 |
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Molecular weight(分子量): |
71.02g/mol |
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Boiling point(沸點(diǎn)): |
-73℃ |
-99.4°F |
Melting point(熔點(diǎn)): |
-168℃ |
-270.4°F |
Vapor pressure(蒸汽壓): |
9997KPa(21.1℃) |
1450Psia(70°F) |
Specific volume(比容): |
0.34m3/kg(21.1℃,101.325KPa) |
5.4ft3/lb(70°F,14.696psia) |
Threshold Limit Value(人體的最高容許濃度): |
10ppm |
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UN Number(UN號(hào)碼): |
UN2451 |
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DOT Classification(DOT類別): |
2.2(Nonflammable Gas)(不燃?xì)怏w) |
DOT Lable(DOT標(biāo)簽): |
Non-flammable gas (不燃?xì)怏w) |
Grsde(級(jí)別): |
4N |
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Purity(純度): |
99.99% |
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純度規(guī)格 |
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Impurity(非組分): |
Specification(標(biāo)準(zhǔn)) |
Oxygen(氧): |
≤10.0 ppmv |
Nitrogen(氮): |
≤10.0 ppmv |
Carbon Dioxide(二氧化碳): |
≤10.0 ppmv |
Carbon Tetrafluoride(四氟化碳): |
≤40.0 ppmv |
Water(水): |
≤1.0 ppmv |
Acidity as HF(酸化物,如氟化氫): |
≤5.0 ppmv |
Nitrous Oxide(氧化亞氮) |
≤10.0 ppmv |
包裝 |
容積 |
重量 |
連接閥門 |
小鋼瓶 |
44L |
20Kg |
CGA640 |
應(yīng)用:等離子刻蝕;硅、氮化硅、鎢·硅化合物和鎢薄膜的刻蝕;CVD爐室清洗
| | 點(diǎn)擊次數(shù):2938 | |
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